JPH03127633U - - Google Patents

Info

Publication number
JPH03127633U
JPH03127633U JP3729190U JP3729190U JPH03127633U JP H03127633 U JPH03127633 U JP H03127633U JP 3729190 U JP3729190 U JP 3729190U JP 3729190 U JP3729190 U JP 3729190U JP H03127633 U JPH03127633 U JP H03127633U
Authority
JP
Japan
Prior art keywords
board
substrate
piston
contact
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3729190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3729190U priority Critical patent/JPH03127633U/ja
Publication of JPH03127633U publication Critical patent/JPH03127633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP3729190U 1990-04-09 1990-04-09 Pending JPH03127633U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3729190U JPH03127633U (en]) 1990-04-09 1990-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3729190U JPH03127633U (en]) 1990-04-09 1990-04-09

Publications (1)

Publication Number Publication Date
JPH03127633U true JPH03127633U (en]) 1991-12-24

Family

ID=31544267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3729190U Pending JPH03127633U (en]) 1990-04-09 1990-04-09

Country Status (1)

Country Link
JP (1) JPH03127633U (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012021859A (ja) * 2010-07-14 2012-02-02 Hitachi High-Technologies Corp 自動分析装置
JP2013187374A (ja) * 2012-03-08 2013-09-19 Hitachi High-Tech Instruments Co Ltd 半導体後工程組立装置
JP2013193808A (ja) * 2012-03-16 2013-09-30 Seiko Epson Corp 搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012021859A (ja) * 2010-07-14 2012-02-02 Hitachi High-Technologies Corp 自動分析装置
JP2013187374A (ja) * 2012-03-08 2013-09-19 Hitachi High-Tech Instruments Co Ltd 半導体後工程組立装置
JP2013193808A (ja) * 2012-03-16 2013-09-30 Seiko Epson Corp 搬送装置

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